DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Chongsei | ko |
dc.contributor.author | Jeon, Buil | ko |
dc.contributor.author | Yoon, Giwan | ko |
dc.date.accessioned | 2018-09-18T06:38:57Z | - |
dc.date.available | 2018-09-18T06:38:57Z | - |
dc.date.created | 2018-07-27 | - |
dc.date.created | 2018-07-27 | - |
dc.date.created | 2018-07-27 | - |
dc.date.created | 2018-07-27 | - |
dc.date.issued | 2018-07 | - |
dc.identifier.citation | APPLIED SCIENCES, v.8, no.7 | - |
dc.identifier.issn | 2076-3417 | - |
dc.identifier.uri | http://hdl.handle.net/10203/245701 | - |
dc.description.abstract | In this paper, we present a study of various ZnO/SiO2-stacked thin film structures for flexible micro-energy harvesting devices. Two groups of micro-energy harvesting devices, SiO2/ZnO/SiO2 micro-energy generators (SZS-MGs) and ZnO/SiO2/ZnO micro-energy generators (ZSZ-MGs), were fabricated by stacking both SiO2 and ZnO thin films, and the resulting devices were characterized. With a particular interest in the fabrication of flexible devices, all the ZnO and SiO2 thin films were deposited on indium tin oxide (ITO)-coated polyethylene naphthalate (PEN) substrates using a radio frequency (RF) magnetron sputtering technique. The effects of the thickness and/or position of the SiO2 films on the device performance were investigated by observing the variations of output voltage in comparison with that of a control sample. As a result, compared to the ZnO single-layer device, all the ZSZ-MGs showed much better output voltages, while all the SZS-MG showed only slightly better output voltages. Among the ZSZ-MGs, the highest output voltages were obtained from the ZSZ-MGs where the SiO2 thin films were deposited using a deposition power of 150W. Overall, the device performance seems to depend significantly on the position as well as the thickness of the SiO2 thin films in the ZnO/SiO2-stacked multilayer structures, in addition to the processing conditions. | - |
dc.language | English | - |
dc.publisher | MDPI | - |
dc.subject | TRIBOELECTRIC NANOGENERATORS | - |
dc.subject | VIBRATION | - |
dc.title | Formation and Characterization of Various ZnO/SiO2-Stacked Layers for Flexible Micro-Energy Harvesting Devices | - |
dc.type | Article | - |
dc.identifier.wosid | 000441814300117 | - |
dc.identifier.scopusid | 2-s2.0-85049909912 | - |
dc.type.rims | ART | - |
dc.citation.volume | 8 | - |
dc.citation.issue | 7 | - |
dc.citation.publicationname | APPLIED SCIENCES | - |
dc.identifier.doi | 10.3390/app8071127 | - |
dc.contributor.localauthor | Yoon, Giwan | - |
dc.description.isOpenAccess | Y | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | silicon dioxide | - |
dc.subject.keywordAuthor | piezoelectric device | - |
dc.subject.keywordAuthor | zinc oxide | - |
dc.subject.keywordAuthor | RF sputtering deposition | - |
dc.subject.keywordAuthor | silicon dioxide | - |
dc.subject.keywordAuthor | piezoelectric device | - |
dc.subject.keywordAuthor | zinc oxide | - |
dc.subject.keywordAuthor | RF sputtering deposition | - |
dc.subject.keywordPlus | TRIBOELECTRIC NANOGENERATORS | - |
dc.subject.keywordPlus | VIBRATION | - |
dc.subject.keywordPlus | TRIBOELECTRIC NANOGENERATORS | - |
dc.subject.keywordPlus | VIBRATION | - |
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