Flexible microdevices based on carbon nanotubes

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This work reports the fabrication and testing of flexible carbon nanotube microdevices made using hot embossing material transfer. Both micro-plasma and photodetector devices were made using as-grown unpurified multi-wall carbon nanotubes printed on PMMA substrates. Optical detectors were fabricated by attaching metal wires and monitoring the resistance as a function of light exposure. The electrical resistance of the nanotubes showed a strong sensitivity to light exposure which was also enhanced by heating the devices. While such processes in MWCNTs are not fully understood, the addition of thermal energy is believed to generate additional free charge carriers in the nanotubes. The plasma-generating microdevices consisted of a thin layer of thermoplastic polymer having the CNT electrode on one side and a metal electrode on the reverse side. The devices were electrically tested under atmospheric conditions with 0.01-1 kV ac and at 2.5 kHz, with the plasma igniting near 0.7 kV. The fabrication of these flexible organic devices demonstrates the ability to pattern useful carbon nanotube microdevices in low-cost thermoplastic polymers.
Publisher
IOP PUBLISHING LTD
Issue Date
2006-12
Language
English
Article Type
Article
Keywords

ATMOSPHERIC-PRESSURE MICROPLASMA; BARRIER PLASMA ACTUATOR; DEVICES; PHOTOCONDUCTIVITY; ARRAYS; PHOTORESPONSE; TRANSISTORS; MECHANISMS; RESISTANCE; RESPONSES

Citation

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.16, no.12, pp.2722 - 2729

ISSN
0960-1317
DOI
10.1088/0960-1317/16/12/027
URI
http://hdl.handle.net/10203/245508
Appears in Collection
ME-Journal Papers(저널논문)
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