DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jungchul | ko |
dc.contributor.author | Naeli, Kianoush | ko |
dc.contributor.author | Hunter, Hanif | ko |
dc.contributor.author | Berg, John | ko |
dc.contributor.author | Wright, Tanya | ko |
dc.contributor.author | Courcimault, Christophe | ko |
dc.contributor.author | Naik, Nisarga | ko |
dc.contributor.author | Allen, Mark | ko |
dc.contributor.author | Brand, Oliver | ko |
dc.contributor.author | Glezer, Ari | ko |
dc.contributor.author | King, William P. | ko |
dc.date.accessioned | 2018-09-18T06:02:34Z | - |
dc.date.available | 2018-09-18T06:02:34Z | - |
dc.date.created | 2018-08-21 | - |
dc.date.created | 2018-08-21 | - |
dc.date.issued | 2007-02 | - |
dc.identifier.citation | SENSORS AND ACTUATORS A-PHYSICAL, v.134, no.1, pp.128 - 139 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | http://hdl.handle.net/10203/245505 | - |
dc.description.abstract | This paper reports the development of microelectromechanical metrology tools to characterize liquid and gaseous jets generated from microfabricated nozzles with diameters ranging from I to 12 mu m. Microcantilever sensors with either piezoresistive elements or integrated heating elements have been fabricated and applied to measure thrusts, velocities, and heat transfer characteristics of micro/nanojets. Piezoresistive cantilever measurements showed that liquid butane microjets from a 6 mu m diameter nozzle achieved velocities 40-60 m/s for driving pressures 0.6-1.4MPa. Jet velocities estimated from cantilever measurements agreed well with shadowgraphy results within 12.5% without any correction factor. A microcantilever with integrated heating elements measured cooling capacities of liquid butane microjets on the order of 10(-5) W/K. (c) 2006 Published by Elsevier B.V. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.subject | ATOMIC-FORCE MICROSCOPE | - |
dc.subject | DATA-STORAGE | - |
dc.subject | PIEZORESISTIVE SENSORS | - |
dc.subject | CANTILEVERS | - |
dc.subject | RESOLUTION | - |
dc.subject | DESIGN | - |
dc.subject | CHIP | - |
dc.subject | ANEMOMETER | - |
dc.subject | VAPOR | - |
dc.title | Characterization of liquid and gaseous micro- and nanojets using microcantilever sensors | - |
dc.type | Article | - |
dc.identifier.wosid | 000245066000015 | - |
dc.identifier.scopusid | 2-s2.0-33847247368 | - |
dc.type.rims | ART | - |
dc.citation.volume | 134 | - |
dc.citation.issue | 1 | - |
dc.citation.beginningpage | 128 | - |
dc.citation.endingpage | 139 | - |
dc.citation.publicationname | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.identifier.doi | 10.1016/j.sna.2006.05.014 | - |
dc.contributor.localauthor | Lee, Jungchul | - |
dc.contributor.nonIdAuthor | Naeli, Kianoush | - |
dc.contributor.nonIdAuthor | Hunter, Hanif | - |
dc.contributor.nonIdAuthor | Berg, John | - |
dc.contributor.nonIdAuthor | Wright, Tanya | - |
dc.contributor.nonIdAuthor | Courcimault, Christophe | - |
dc.contributor.nonIdAuthor | Naik, Nisarga | - |
dc.contributor.nonIdAuthor | Allen, Mark | - |
dc.contributor.nonIdAuthor | Brand, Oliver | - |
dc.contributor.nonIdAuthor | Glezer, Ari | - |
dc.contributor.nonIdAuthor | King, William P. | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | MEMS | - |
dc.subject.keywordAuthor | microcantilever | - |
dc.subject.keywordAuthor | microjets | - |
dc.subject.keywordAuthor | nanojets | - |
dc.subject.keywordAuthor | hot-wire | - |
dc.subject.keywordAuthor | thrust | - |
dc.subject.keywordAuthor | shadowgraphy | - |
dc.subject.keywordPlus | ATOMIC-FORCE MICROSCOPE | - |
dc.subject.keywordPlus | DATA-STORAGE | - |
dc.subject.keywordPlus | PIEZORESISTIVE SENSORS | - |
dc.subject.keywordPlus | CANTILEVERS | - |
dc.subject.keywordPlus | RESOLUTION | - |
dc.subject.keywordPlus | DESIGN | - |
dc.subject.keywordPlus | CHIP | - |
dc.subject.keywordPlus | ANEMOMETER | - |
dc.subject.keywordPlus | VAPOR | - |
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