DC Field | Value | Language |
---|---|---|
dc.contributor.author | M.G.Lee | - |
dc.contributor.author | K.H.Kim | - |
dc.contributor.author | Gweon, Dae-Gab | - |
dc.date.accessioned | 2011-07-08T06:52:33Z | - |
dc.date.available | 2011-07-08T06:52:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | ASPE 2002 Anual meeting, v., no., pp.162 - 165 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24522 | - |
dc.language | ENG | - |
dc.language.iso | en_US | en |
dc.title | Novel linear motor for high precision stage of semiconductor lithography system | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 162 | - |
dc.citation.endingpage | 165 | - |
dc.citation.publicationname | ASPE 2002 Anual meeting | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | M.G.Lee | - |
dc.contributor.nonIdAuthor | K.H.Kim | - |
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