DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Yong Hoon | ko |
dc.contributor.author | Jin, Yun Su | ko |
dc.contributor.author | Kim, Chang-Keun | ko |
dc.contributor.author | Hong, Songcheol | ko |
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.date.accessioned | 2018-07-24T02:22:17Z | - |
dc.date.available | 2018-07-24T02:22:17Z | - |
dc.date.created | 2018-07-04 | - |
dc.date.created | 2018-07-04 | - |
dc.date.created | 2018-07-04 | - |
dc.date.issued | 2018-06 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.27, no.3, pp.497 - 505 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/244017 | - |
dc.description.abstract | A 4-terminal microelectromechanical systems (MEMS) relay has long been sought for signal switching applications because it allows de-coupling of the actuation (body and gate) and signal (source and drain) components unlike a 3-terminal MEMS relay. However, the contact resistance still remains a serious problem in current 4-terminal MEMS relays compared with the 3-terminal MEMS relays. In this paper, using theoretical analysis, we first determined that the two-contact design, which was the most common design in the 4-terminal MEMS relay, was the origin of the high contact resistance. We subsequently developed a 4-terminal MEMS relay with a novel single-contact design. The fabricated 4-terminal MEMS relay with the single-contact design exhibited a contact resistance of 18 m Omega. To the best of our knowledge, this result is the lowest value among 4-terminal MEMS relays. In addition, we demonstrated that the two-contacts are the origin of the high contact resistance using measurement. The relay operated up to 1.1 x 10(6) cycles at 1 V / 50 mA in air and hot switching conditions. Finally, the proposed 4-terminal MEMS relay was hermetically packaged for use in commercial applications. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | POWER APPLICATIONS | - |
dc.subject | SWITCH | - |
dc.subject | CIRCUITS | - |
dc.subject | DEVICES | - |
dc.title | A Low Contact Resistance 4-Terminal Mems Relay: Theoretical Analysis, Design, and Demonstration | - |
dc.type | Article | - |
dc.identifier.wosid | 000433954100017 | - |
dc.identifier.scopusid | 2-s2.0-85045309940 | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 497 | - |
dc.citation.endingpage | 505 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.identifier.doi | 10.1109/JMEMS.2018.2822402 | - |
dc.contributor.localauthor | Hong, Songcheol | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Microelectromechanical systems (MEMS) switch | - |
dc.subject.keywordAuthor | MEMS relay | - |
dc.subject.keywordAuthor | microswitch | - |
dc.subject.keywordAuthor | relay | - |
dc.subject.keywordAuthor | contact resistance | - |
dc.subject.keywordAuthor | reliability | - |
dc.subject.keywordAuthor | 4-terminal switch | - |
dc.subject.keywordAuthor | 4-terminal relay | - |
dc.subject.keywordAuthor | packaging | - |
dc.subject.keywordPlus | POWER APPLICATIONS | - |
dc.subject.keywordPlus | SWITCH | - |
dc.subject.keywordPlus | CIRCUITS | - |
dc.subject.keywordPlus | DEVICES | - |
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