주사 현미경용 평면 스캐너 Part 2 : 정,동 특성 평가A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part2: Evaluation of Static and Dynamic Properties

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this paper shows experimental evaluation results of the nano-positioning planner scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as the static properties of the planar scanner, we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits. Finally, as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM imaging results with up 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.
Publisher
한국소음진동공학회
Issue Date
2005-10
Keywords

나노 평면 스캐너; 유연 가이드; 압전 소자 구동기; 고유진동수; 주사 현미경; 원자현미경

Citation

한국소음진동공학회논문집, Vol.15, No.11, pp.1295-1302

URI
http://hdl.handle.net/10203/24394
Appears in Collection
ME-Journal Papers(저널논문)
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[2005]주사 현미경용 평면 스캐너 Part 2 정,동 특성 평가.pdf(1.34 MB)Download

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