DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이동연 | ko |
dc.contributor.author | 김동민 | ko |
dc.contributor.author | 권대갑 | ko |
dc.date.accessioned | 2011-07-04T05:54:33Z | - |
dc.date.available | 2011-07-04T05:54:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-12 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.30, no.12, pp.1611 - 1617 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24386 | - |
dc.description.abstract | A compact and two-dimensional atomic force microscope (AFM) using an orthogonal sample scanner, a calibrated homodyne laser interferometer and a commercial AFM head was developed for use in the nano-metrology field. The x and y position of the sample with respect to the tip are acquired by using the laser interferometer in the open-loop state, when each z data point of the AFM head is taken. The sample scanner which has a motion amplifying mechanism was designed to move a sample up to $100{\times}100{\mu}m^2$ in orthogonal way, which means less crosstalk between axes. Moreover, the rotational errors between axes are measured to ensure the accuracy of the calibrated AFM within the full scanning range. The conventional homodyne laser interferometer was used to measure the x and y displacements of the sample and compensated via an X-ray interferometer to reduce the nonlinearity of the optical interferometer. The repeatability of the calibrated AFM was measured to sub-nm within a few hundred nm scanning range. | - |
dc.language | Korean | - |
dc.language.iso | en_US | en |
dc.publisher | 대한기계학회 | - |
dc.title | 직교 스캐너와 레이저 간섭계를 사용한 교정용 원자현미경 | - |
dc.title.alternative | Atomic Force Microscope for Standard Length Metrology | - |
dc.type | Article | - |
dc.subject.alternative | Calibrated Atomic Force Microscope | en |
dc.subject.alternative | Laser Interferometer | en |
dc.subject.alternative | Orthogonal Scanner | en |
dc.subject.alternative | Flexure-guide | en |
dc.type.rims | ART | - |
dc.citation.volume | 30 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 1611 | - |
dc.citation.endingpage | 1617 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.identifier.kciid | ART001095361 | - |
dc.contributor.localauthor | 권대갑 | - |
dc.contributor.nonIdAuthor | 이동연 | - |
dc.contributor.nonIdAuthor | 김동민 | - |
dc.subject.keywordAuthor | Calibrated Atomic Force Microscope(교정용 원자현미경) | - |
dc.subject.keywordAuthor | Laser Interferometer(레이저 간섭계) | - |
dc.subject.keywordAuthor | Orthogonal Scanner(직교 스캐너) | - |
dc.subject.keywordAuthor | Flexure-guide(유연 가이드) | - |
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