VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지

Abstract

This paper presents one-axis high precision scanning system and illustrates the design of modified X-Y-𝞡 stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100nm resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF motions by four VCM actuators which are located on the sample plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomlish high throughput. The optimal design of maximazing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of seleting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The result can be verified by MAXWELL. The designed stage has the accelation of about 5 m/s²with 40kg total mass including wafer chuck and interfermeter mirror. And the temperature of coil is increasd 50℃. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5nm and scanning resolution about 40nm is 25mm/s constant speed.