DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최영만 | ko |
dc.contributor.author | 권대갑 | ko |
dc.contributor.author | 이문구 | ko |
dc.date.accessioned | 2011-07-04T05:37:31Z | - |
dc.date.available | 2011-07-04T05:37:31Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-12 | - |
dc.identifier.citation | 한국정밀공학회지, v.22, no.12, pp.51 - 60 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24377 | - |
dc.description.abstract | This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control. | - |
dc.description.sponsorship | 이 논문을 쓸 수 있도록 물심 양면으로 지원하여 주신 순환 엔지니어링(주)를 포함한 모든 분들께 감사 드립니다. | en |
dc.language | Korean | - |
dc.language.iso | ko | en |
dc.publisher | 한국정밀공학회 | - |
dc.title | 초정밀 선형 모터 시스템의 적응형 힘리플 보상과 정밀 트랙킹 제어 | - |
dc.title.alternative | Adaptive Force Ripple Compensation and Precision Tracking Control of High Precision Linear Motor System | - |
dc.type | Article | - |
dc.subject.alternative | Time delay control | en |
dc.subject.alternative | Force ripple | en |
dc.subject.alternative | Linear Motor | en |
dc.subject.alternative | Adaptive control | en |
dc.type.rims | ART | - |
dc.citation.volume | 22 | - |
dc.citation.issue | 12 | - |
dc.citation.beginningpage | 51 | - |
dc.citation.endingpage | 60 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.identifier.kciid | ART000981986 | - |
dc.contributor.localauthor | 권대갑 | - |
dc.contributor.nonIdAuthor | 최영만 | - |
dc.contributor.nonIdAuthor | 이문구 | - |
dc.subject.keywordAuthor | Time delay control | - |
dc.subject.keywordAuthor | Force ripple | - |
dc.subject.keywordAuthor | Linear Motor | - |
dc.subject.keywordAuthor | Adaptive control | - |
dc.subject.keywordAuthor | 시간지연제어 | - |
dc.subject.keywordAuthor | 힘리플 | - |
dc.subject.keywordAuthor | 선형 모터 | - |
dc.subject.keywordAuthor | 적응 제어 | - |
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