DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김기현 | ko |
dc.contributor.author | 권대갑 | ko |
dc.date.accessioned | 2011-07-04T03:49:15Z | - |
dc.date.available | 2011-07-04T03:49:15Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-09 | - |
dc.identifier.citation | 한국정밀공학회지, v.22, no.9, pp.147 - 154 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/24368 | - |
dc.description.abstract | A precision bi-directional actuator for a high precision leveling system with Zθxθy motions is proposed and designed in this paper. The actuator is composed of a force generation structure, a guide mechanism, and a symmetric structure. At first, its driving force is generated by a change of flux in air gaps by permanent and changeable flux. The permanent flux is generated by a permanent magnet. The changeable flux is created by variable current flowing through coil. The combination of permanent and changeable flux makes various flux densities in air gaps between moving part and fixed yokes. And then, the difference between flux densities in lower and upper gaps creates forces for the bi-direction(z) motion. The guide mechanism of this actuator is composed of two circular plates and one shaft. Reducing motions generated by forces except z-motion, these circular plates endow the actuator with high stiffness for fast settling time. And the function of the shaft is to transfer motion to an object. At last, total body has a symmetric structure to be stable on thermal error. The actuator is designed by MAXWELL 2D and ProMECHANICA. The designed actuator is evaluated by 8nm laser doppler vibrometer, dynamic signal analyzer, and simple PID controller. | - |
dc.description.sponsorship | 본 논문은 한국과학재단에서 지원하는 한러 국제 공동과제의 연구를 통한 결과물이며, 실험장치 개발에 도움을 주신 한국오토피아에 감사를 표현합니다. | en |
dc.language | Korean | - |
dc.language.iso | ko | en |
dc.publisher | 한국정밀공학회 | - |
dc.title | 영구 자석과 전자석의 상호작용을 이용한 초정밀 양방향 구동기 설계 | - |
dc.title.alternative | Design of ultraprecision bi-directional actuator for nm using a permanent magnet and electromagnet | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 22 | - |
dc.citation.issue | 9 | - |
dc.citation.beginningpage | 147 | - |
dc.citation.endingpage | 154 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.identifier.kciid | ART000967940 | - |
dc.contributor.localauthor | 권대갑 | - |
dc.contributor.nonIdAuthor | 김기현 | - |
dc.subject.keywordAuthor | High precision | - |
dc.subject.keywordAuthor | bi-directional actuator | - |
dc.subject.keywordAuthor | permanent magnet | - |
dc.subject.keywordAuthor | electromagnet | - |
dc.subject.keywordAuthor | leveling system | - |
dc.subject.keywordAuthor | High precision | - |
dc.subject.keywordAuthor | bi-directional actuator | - |
dc.subject.keywordAuthor | permanent magnet | - |
dc.subject.keywordAuthor | electromagnet | - |
dc.subject.keywordAuthor | leveling system | - |
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