학위논문(박사) - 한국과학기술원 : 화학과, 2017.2,[vi, 75 p. :]
lithography; masklee plasma technique; nanoimprint; metal oxide; nanostructure; 리소그래피; 마스크리스 플라즈마공정; 나노임프린트; 메탈옥사이드; 나노구조체
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.