DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lu, Yang | ko |
dc.contributor.author | Park, Jiyong | ko |
dc.contributor.author | Yu, Liandong | ko |
dc.contributor.author | Kim, Seung-Woo | ko |
dc.date.accessioned | 2018-05-23T06:29:13Z | - |
dc.date.available | 2018-05-23T06:29:13Z | - |
dc.date.created | 2018-04-23 | - |
dc.date.created | 2018-04-23 | - |
dc.date.created | 2018-04-23 | - |
dc.date.issued | 2018-03 | - |
dc.identifier.citation | APPLIED OPTICS, v.57, no.10, pp.2584 - 2589 | - |
dc.identifier.issn | 1559-128X | - |
dc.identifier.uri | http://hdl.handle.net/10203/241506 | - |
dc.description.abstract | We test an erbium-doped fiber femtosecond laser for its potential as a light source for a coherence scanning interferometer for large field-of-view profiling of rough silicon carbide (SiC) surfaces. This infrared fiber pulse laser is able to provide a relatively long temporal coherence length of similar to 30 mu m to be appropriate for coherence scanning of rough surfaces. At the same time, it offers a high degree of spatial coherence comparable to that of a monochromatic continuous wave laser to achieve a large measurement field of view. In addition, the highly maintained linear polarization of the pulse laser source permits overcoming the low specular reflectance of rough SiC surfaces by polarization-based optical power splitting control between the reference and measurement arms. (c) 2018 Optical Society of America | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.title | 3D profiling of rough silicon carbide surfaces by coherence scanning interferometry using a femtosecond laser | - |
dc.type | Article | - |
dc.identifier.wosid | 000428998400047 | - |
dc.identifier.scopusid | 2-s2.0-85044817510 | - |
dc.type.rims | ART | - |
dc.citation.volume | 57 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 2584 | - |
dc.citation.endingpage | 2589 | - |
dc.citation.publicationname | APPLIED OPTICS | - |
dc.identifier.doi | 10.1364/AO.57.002584 | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Lu, Yang | - |
dc.contributor.nonIdAuthor | Yu, Liandong | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | PHASE-SHIFTING INTERFEROMETRY | - |
dc.subject.keywordPlus | SPATIAL COHERENCE | - |
dc.subject.keywordPlus | REPETITION RATE | - |
dc.subject.keywordPlus | PULSES | - |
dc.subject.keywordPlus | LIGHT | - |
dc.subject.keywordPlus | PROFILOMETRY | - |
dc.subject.keywordPlus | MIRROR | - |
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