Ar plasma etching of hexagonal boron nitride films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Hamin | ko |
| dc.contributor.author | Shin, Gwang Hyuk | ko |
| dc.contributor.author | Lee, Khang June | ko |
| dc.contributor.author | Choi, Sung-Yool | ko |
| dc.date.accessioned | 2018-02-21T05:21:48Z | - |
| dc.date.available | 2018-02-21T05:21:48Z | - |
| dc.date.created | 2018-01-29 | - |
| dc.date.created | 2018-01-29 | - |
| dc.date.issued | 2017-12-07 | - |
| dc.identifier.citation | ICAMD 2017 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/240007 | - |
| dc.language | English | - |
| dc.publisher | ICAMD 2017 | - |
| dc.title | Ar plasma etching of hexagonal boron nitride films | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | ICAMD 2017 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | Ramada Plaza Jeju Hotel | - |
| dc.contributor.localauthor | Choi, Sung-Yool | - |
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