Frontside-only processing of 2-D MEMS scanners for miniature dual-axis confocal microendoscopes
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeong, Jae-Woong | ko |
| dc.contributor.author | Vaithilingam, Srikant | ko |
| dc.contributor.author | Solgaard, Olav | ko |
| dc.date.accessioned | 2018-01-30T03:56:54Z | - |
| dc.date.available | 2018-01-30T03:56:54Z | - |
| dc.date.created | 2018-01-11 | - |
| dc.date.issued | 2011-06-09 | - |
| dc.identifier.citation | International Conference on Solid-State Sensors, Actuators and Microsystems | - |
| dc.identifier.uri | http://hdl.handle.net/10203/238734 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Frontside-only processing of 2-D MEMS scanners for miniature dual-axis confocal microendoscopes | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Conference on Solid-State Sensors, Actuators and Microsystems | - |
| dc.identifier.conferencecountry | CC | - |
| dc.identifier.conferencelocation | China National Convention Center, Beijing | - |
| dc.contributor.localauthor | Jeong, Jae-Woong | - |
| dc.contributor.nonIdAuthor | Vaithilingam, Srikant | - |
| dc.contributor.nonIdAuthor | Solgaard, Olav | - |
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