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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Investigation of resistive probes with high sensitivity

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dc.contributor.authorKim, Sang Wanko
dc.contributor.authorSong, Jae Youngko
dc.contributor.authorKim, Jong Pilko
dc.contributor.authorChoi, Woo Youngko
dc.contributor.authorChung, Han Kiko
dc.contributor.authorPark, Jae Hyunko
dc.contributor.authorKo, Hyungsooko
dc.contributor.authorPark, Hongsikko
dc.contributor.authorPark, Chulminko
dc.contributor.authorHong, Seungbumko
dc.contributor.authorChoa, Sung-Hoonko
dc.contributor.authorLee, Jong Dukko
dc.contributor.authorShin, Hyungcheolko
dc.contributor.authorPark, Byung-Gookko
dc.date.accessioned2018-01-30T02:31:44Z-
dc.date.available2018-01-30T02:31:44Z-
dc.date.created2017-12-29-
dc.date.issued2008-06-
dc.identifier.citationIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008-
dc.identifier.urihttp://hdl.handle.net/10203/238146-
dc.description.abstractNovel fabrication methods are investigated to enhance the sensitivity of resistive probes. In this paper, two new silicon resistive probes are presented by using two-dimensional device simulation (SILVACO™). Enhancement probe and 1-MOS probe are formed by using anisotropic etch and mask transcription process. Due to novel structures, the sensitivity of resistive probes is increased dramatically.-
dc.languageEnglish-
dc.publisherIEEE-
dc.titleInvestigation of resistive probes with high sensitivity-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameIEEE 2008 Silicon Nanoelectronics Workshop, SNW 2008-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationHonolulu, Hawaii-
dc.identifier.doi10.1109/SNW.2008.5418407-
dc.contributor.localauthorHong, Seungbum-
dc.contributor.nonIdAuthorKim, Sang Wan-
dc.contributor.nonIdAuthorSong, Jae Young-
dc.contributor.nonIdAuthorKim, Jong Pil-
dc.contributor.nonIdAuthorChoi, Woo Young-
dc.contributor.nonIdAuthorChung, Han Ki-
dc.contributor.nonIdAuthorPark, Jae Hyun-
dc.contributor.nonIdAuthorKo, Hyungsoo-
dc.contributor.nonIdAuthorPark, Hongsik-
dc.contributor.nonIdAuthorPark, Chulmin-
dc.contributor.nonIdAuthorChoa, Sung-Hoon-
dc.contributor.nonIdAuthorLee, Jong Duk-
dc.contributor.nonIdAuthorShin, Hyungcheol-
dc.contributor.nonIdAuthorPark, Byung-Gook-
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MS-Conference Papers(학술회의논문)
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