COMPACT OCT ENDOMICROSCOPIC CATHETER USING FLIP-CHIP BONDED LISSAJOUS SCANNED ELECTROTHERMAL MEMS FIBER SCANNER

Abstract

We report a compact optical coherence tomography (OCT) endomicroscope with a Lissajous scanned electrothermal MEMS fiber scanner. Two-dimensional Lissajous scanning was realized by Joule heating of the electrothermal MEMS fiber scanner. The compact packaging of MEMS scanner has a primary challenge, particularly in inserting it into an endomicroscopic catheter. The electrothermal MEMS fiber scanner was precisely designed and flip-chip bonded with a thin printed circuit board and completely packaged with 1.65 mm diameter housing tube, 1 mm diameter GRIN lens, and a single mode optical fiber. A 1.65 mm diameter OCT endomicroscopic catheter was successfully combined with a spectral-domain OCT system. Two-dimensional OCT image of a finger nail was successfully obtained with the endomicroscopic catheter.