Effective direct writing of hierarchical 3D polymer micromeshes by continuous out-of-plane longitudinal scanning

Abstract

Nano-stereolithography, also known as two-photon direct writing is widely used for fabrication of the three-dimensional microstructure with submicron resolution. Heirarchical three-dimensional meshed microstructures are crucial for microelectromechanical systems (MEMS), photonics and biotechnological applications. Routine study for various applications using such structures requires fabrication of many sets of structures. Conventionally such meshed microstructures are constructed through layer-by-layer accumulation with discrete point-to-point laser scanning. This technique is time consuming, leading to long fabrication times placing constraints on practical applications as well as optimization of structures. In this work we propose continuous longitudinal laser scanning method as an effective means for direct writing of hierarchical three-dimensional meshed microstructures. The advantages of continuously longitudinal laser scanning method are explored for its time economy and fabrication effectiveness; a fabrication window is suggested to determine the fabrication parameter easily according to laser power and structural design.