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Charging characteristics of Ru nanocrystals embedded in Al2O3 matrix prepared by using the initial growth stage of Ru plasma-enhanced atomic layer deposition

Kwack, Won-Sub; Choi, Hyun-Jin; Choi, Woo-Chang; Oh, Heung-Ryong; Shin, Seung-Yong; Moon, Kyoung Il; Kwak, Ji-Yeon; et al, JOURNAL OF CERAMIC PROCESSING RESEARCH, v.13, no.3, pp.338 - 342, 2012-06

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