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Partially Depleted SOI NMOSFET's with Self-Aligned Polysilicon Gate Formed on the Recessed Channel Region

Jong-Ho Lee; Hyung-Cheol Shin; Jong-June Kim; Choon-Bae Park; Young-June Park, IEEE ELECTRON DEVICE LETTERS, v.18, no.5, pp.184 - 186, 1997-05

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