Browse "RIMS Collection" by Author Oh, G.Y.
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| Planarization and trench filling on severe surface topography with thick photoresist for MEMS Yoon, Jun-Bo; Oh, G.Y.; Han, Chul-Hi; Yoon, Euisik; Kim, Choong Ki, the SPIE symposium on Micromachining and Microfabrication: Materials and Device Characterization in micromachining, pp.297 - 306, SPIE, 1998-09-21 |
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