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Silicon Photonic MEMS Phase-Shifter

Sattari, Hamed; Graziosi, Teodoro; Kiss, Marcell; Seok, Tae Joon; Han, Sangyoon; Wu, Ming C.; Quack, Niels, OPTICS EXPRESS, v.27, no.13, pp.18959 - 18969, 2019-06

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