Multi-cantilever MEMS sensor, manufacturing method thereof, sound source localization apparatus using the multi-cantilever MEMS sensor, sound source localization method using the sound source localization apparatus

Abstract

Disclosed herein is a multi-cantilever MEMS sensor functioning as a mechanical sensor having a plurality of cantilevers, replacing a conventional DSP based sound source localization algorithm and reducing production cost when the MEMES sensor applied to mass-produced robots, a manufacturing method thereof, a sound source localization apparatus using the multi-cantilever MEMS sensor and a sound source localization method using the sound source localization apparatus. The multi-cantilever MEMS sensor comprises a plurality of cantilevers 100 each of which includes a piezoresistor 20 and a sensing part 30 for sensing a predetermined signal generated according to the piezoresistor 20; and a terminal T for detecting the signal generated according to the piezoresistor 20, wherein one end of each cantilever is a free end and the other end thereof is a fixed end of each cantilever, the piezoresistor 20 and the sensing part 30 are formed at the fixed end, and the free ends of the plurality of cantilevers 100 have different lengths. A method of manufacturing the multi-cantilever MEMS sensor is provided. Furthermore, a method of using the multi-cantilever MEMS sensor and a sound source localization apparatus are provided.