Batch fabrication method of three-dimensional photonic microstructures대면적 3차원 광학 구조의 제조 방법

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Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.
Assignee
KAIST
Country
US (United States)
Issue Date
2016-10-04
Application Date
2015-03-02
Application Number
14635186
Registration Date
2016-10-04
Registration Number
9459381
URI
http://hdl.handle.net/10203/230343
Appears in Collection
BiS-Patent(특허)
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