유기초분자의 자기 집합 및 UV식각을 이용한 나노 패턴 및 탄소 나노튜브-바이오 나노 어레이의 제작 방법Method for fabricating a nanopattern usingself-assembly of supramolecules and UV etching

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Assignee
KAIST
Country
JA (Japan)
Issue Date
2007-05-11
Application Date
2004-06-10
Application Number
2004-173264
Registration Date
2007-05-11
Registration Number
3953473
URI
http://hdl.handle.net/10203/229833
Appears in Collection
CBE-Patent(특허)
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