METHOD FOR MANUFACTURING NANOSTRUCTURE AND NANOSTRUCTURE MANUFACTURED BY THE SAME나노구조물 제조방법, 이에 의하여 제조된 나노구조물, 이를 위한 제조장치

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Provided are methods for producing nanostructures and nanostructures obtained thereby. The methods include heating a certain point of a substrate dipped into a precursor solution of the nanostructures so that the nanostructures are grown in a liquid phase environment without evaporation of the precursor solution. The methods show excellent cost-effectiveness because of the lack of a need for precursor evaporation at high temperature. In addition, unlike the vapor-liquid-solid (VLS) process performed in a vapor phase, the method includes growing nanostructures in a liquid phase environment, and thus provides excellent safety and eco-friendly characteristics as well as cost-effectiveness. Further, the method includes locally heating a substrate dipped into a precursor solution merely at a point where the nanostructures are to be grown, so that the nanostructures are grown directly at a desired point of the substrate. Therefore, it is possible to grow and produce nanostructures directly in a device. As a result, unlike the conventional process, it is not necessary to assemble and integrate the nanostructures produced in a sacrificial substrate into a device.
Assignee
KAIST
Country
US (United States)
Application Date
2010-04-28
Application Number
12769241
Registration Date
2014-10-21
Registration Number
8865114
URI
http://hdl.handle.net/10203/229523
Appears in Collection
ME-Patent(특허)
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