Tuning fork gyroscope

Abstract

A tuning fork type gyroscope includes a vibratory structure arranged to be spaced from a plane formed by a first axis and a second axis perpendicular thereto in a third axial direction perpendicular to the plane, driving means for vibrating the vibratory structure in the second axial direction by an electrostatic force, sensor electrode means arranged on said plane so as to sense displacement of the vibratory structure in the third axial direction while the vibratory structure moves with an angular velocity in the first axis, upper torque electrode means for balancing the force, arranged over the vibratory structure so as to control displacement of the vibratory structure in the third axial direction, and lower torque electrode means for balancing the force, arranged under the vibratory structure so as to control displacement of the vibratory structure in the third axial direction. Therefore, the distortion of the vibratory structure can be efficiently prevented, and an angular velocity can be accurately measured.