Browse "PH-Patent(특허)" by Author Chang, Hong-Young
Showing results 1 to 3 of 3
| Multi-electrode에서의 원활한 gas공급을 위한 shower head 및 절연체의 구조제안 Chang, Hong-Young; Lee, Yun Seong; Seo, Sang Hun, 2016-09-07 |
| Plasma device and substrate board treatment Chang, Hong-Young; Lee, Jinwon, 2017-04-12 |
| PLASMA GENERATION APPARATUS Chang, Hong-Young; AN, Sanghyuk; LEE, Jin won, 2015-06-23 |
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Type
- 460 Patent
Date issued
- 177 2010 - 2019
- 62 2000 - 2009
- 1 1998 - 1999