Optimization of Micro Thermoelectric Generator: Enhanced Physical Mechanism for Higher Performance

Abstract

The energy harvesting system, being able to capture the green energy from the surrounding environment, has drawn much attention and also has been intensively investigated. This kind of green energy harvesting system is expected to replace the traditional energy systems in the near future. From this perspective, we need more efficient, cheaper, low-power-operated, wearable wireless electronic devices. More recently, silicon (Si)-based thermoelectric generators have been of great interest due to their their superior physical and electrical properties. Since Si itself does not have a high ZT (figure of merit) due to its high thermal conductivity and low Seebeck coefficient, an optimization effort of lowering thermal conductivity and increasing ZT is highly demanded to improve the power efficiency.