Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장희준 | ko |
| dc.contributor.author | 강일석 | ko |
| dc.contributor.author | 김지혜 | ko |
| dc.contributor.author | 김종현 | ko |
| dc.contributor.author | 이원희 | ko |
| dc.date.accessioned | 2017-07-04T02:35:59Z | - |
| dc.date.available | 2017-07-04T02:35:59Z | - |
| dc.date.created | 2017-06-27 | - |
| dc.date.issued | 2017-03-31 | - |
| dc.identifier.citation | 한국MEMS학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/224653 | - |
| dc.language | English | - |
| dc.publisher | 마이크로나노시스템학회 | - |
| dc.title | Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 한국MEMS학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 제주 KAL 호텔 | - |
| dc.contributor.localauthor | 이원희 | - |
| dc.contributor.nonIdAuthor | 강일석 | - |
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