Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding
- Publisher
- 마이크로나노시스템학회
- Issue Date
- 2017-03-31
- Language
- English
- Citation
한국MEMS학술대회
- Appears in Collection
- NT-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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