Fabrication of nanofluidic chip for liquid TEM cell using parylene and silicon nitride direct bonding

Abstract

For fabrication of a liquid cell for transmission electron microscope (TEM), it is important to achieve bonding of nanochannels with nanoscale thickness of adhesive layers, which requires extremely high flatness and clean interfaces. We fabricated a nanofluidic chip for liquid TEM using parylene-to-SiN direct bonding. A-few-hundred nanometer thick parylene layer was deposited on a SiN wafer and etched to pattern nanochannel and then was directly bonded to another silicon nitride wafer by surface activation and thermal bonding.