DSpace at KOASAS: Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics

DSpace at KOASAS

College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics

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안현준 / 문정민 / 김용준 / 노일철 / 김춘환 / 조병진 researcher

Publisher: SK Hynix

Issue Date: 2017-02-14

Language: English

Citation: 24th Korean Conference on Semiconductors

URI: http://hdl.handle.net/10203/224405

Appears in Collection: EE-Conference Papers(학술회의논문)

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Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
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Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics

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