개시제를 통한 고분자 기상증착기법을 활용한 다공성 초절연물질 (k = 2.0) 표면 실링 방법
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤성준 | ko |
| dc.contributor.author | 박관용 | ko |
| dc.contributor.author | 남태욱 | ko |
| dc.contributor.author | Yoon, Alexander | ko |
| dc.contributor.author | 김형준 | ko |
| dc.contributor.author | 임성갑 | ko |
| dc.contributor.author | 조병진 | ko |
| dc.date.accessioned | 2017-07-03T07:00:23Z | - |
| dc.date.available | 2017-07-03T07:00:23Z | - |
| dc.date.created | 2017-06-22 | - |
| dc.date.created | 2017-06-22 | - |
| dc.date.issued | 2017-02-15 | - |
| dc.identifier.citation | 24th Korean Conference on Semiconductors | - |
| dc.identifier.uri | http://hdl.handle.net/10203/224397 | - |
| dc.language | Korean | - |
| dc.publisher | SK Hynix | - |
| dc.title | 개시제를 통한 고분자 기상증착기법을 활용한 다공성 초절연물질 (k = 2.0) 표면 실링 방법 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 24th Korean Conference on Semiconductors | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 강원도 대명비발디파크 | - |
| dc.contributor.localauthor | 임성갑 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 남태욱 | - |
| dc.contributor.nonIdAuthor | Yoon, Alexander | - |
| dc.contributor.nonIdAuthor | 김형준 | - |
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