광섬유 EFPI 센서를 이용한 나노 이송장치의 개발Development of nano-positioner using fiber optic EFPI sensor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박상욱 | ko |
| dc.contributor.author | 김대현 | ko |
| dc.contributor.author | 김천곤 | ko |
| dc.date.accessioned | 2011-03-03T02:45:47Z | - |
| dc.date.available | 2011-03-03T02:45:47Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2005-09 | - |
| dc.identifier.citation | 센서학회지, v.14, no.5, pp.302 - 307 | - |
| dc.identifier.issn | 1225-5475 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/22372 | - |
| dc.description.abstract | Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.36~ 8.6nm in the displacement range of 0~300m was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy. | - |
| dc.description.sponsorship | 본 연구는 과학기술부의 지원으로 수행하는 21C 프런티어 연구개발사업(수소에너지사업단)의 일환으로 수행되었습니다. | en |
| dc.language | Korean | - |
| dc.language.iso | ko | en |
| dc.publisher | 한국센서학회 | - |
| dc.title | 광섬유 EFPI 센서를 이용한 나노 이송장치의 개발 | - |
| dc.title.alternative | Development of nano-positioner using fiber optic EFPI sensor | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 14 | - |
| dc.citation.issue | 5 | - |
| dc.citation.beginningpage | 302 | - |
| dc.citation.endingpage | 307 | - |
| dc.citation.publicationname | 센서학회지 | - |
| dc.embargo.liftdate | 9999-12-31 | - |
| dc.embargo.terms | 9999-12-31 | - |
| dc.identifier.kciid | ART000972172 | - |
| dc.contributor.localauthor | 김천곤 | - |
| dc.contributor.nonIdAuthor | 박상욱 | - |
| dc.contributor.nonIdAuthor | 김대현 | - |
| dc.subject.keywordAuthor | fiber optic sensor | - |
| dc.subject.keywordAuthor | fabry-perot interferometer | - |
| dc.subject.keywordAuthor | nano-positioner | - |
| dc.subject.keywordAuthor | displacement sensor | - |
- Appears in Collection
- AE-Journal Papers(저널논문)
- Files in This Item
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.