Annihilation behavior of planar defects on phosphorus-doped silicon at low temperatures

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dc.contributor.authorIm, Dong Hyun-
dc.contributor.authorKim, Yong In-
dc.contributor.authorJeong, Myoungho-
dc.contributor.authorPark, Kwang Wuk-
dc.contributor.authorYuk, Jong Min-
dc.contributor.authorKim, Sung Kyu-
dc.contributor.authorNam, Woo Hyun-
dc.contributor.authorKim, Sang Yun-
dc.contributor.authorLee, Kong Soo-
dc.contributor.authorIm, Ki Vin-
dc.contributor.authorLim, Han Jin-
dc.contributor.authorLee, Jeong Yong-
dc.date.accessioned2017-03-30T00:34:53Z-
dc.date.available2017-03-30T00:34:53Z-
dc.date.created2017-02-16-
dc.date.issued2016-02-23-
dc.identifier.citation제23회 한국반도체학술대회-
dc.identifier.urihttp://hdl.handle.net/10203/222572-
dc.languageEnglish-
dc.publisher한국반도체학술대회-
dc.titleAnnihilation behavior of planar defects on phosphorus-doped silicon at low temperatures-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname제23회 한국반도체학술대회-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocation강원도 하이원리조트-
dc.contributor.localauthorKim, Yong In-
dc.contributor.localauthorJeong, Myoungho-
dc.contributor.localauthorYuk, Jong Min-
dc.contributor.localauthorKim, Sung Kyu-
dc.contributor.localauthorNam, Woo Hyun-
dc.contributor.localauthorKim, Sang Yun-
dc.contributor.localauthorLee, Jeong Yong-
dc.contributor.nonIdAuthorIm, Dong Hyun-
dc.contributor.nonIdAuthorPark, Kwang Wuk-
dc.contributor.nonIdAuthorLee, Kong Soo-
dc.contributor.nonIdAuthorIm, Ki Vin-
dc.contributor.nonIdAuthorLim, Han Jin-
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MS-Conference Papers(학술회의논문)
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