DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Park, Sang-Hee | - |
dc.contributor.advisor | 박상희 | - |
dc.contributor.author | Mun, Geumbi | - |
dc.contributor.author | 문금비 | - |
dc.date.accessioned | 2017-03-29T02:35:24Z | - |
dc.date.available | 2017-03-29T02:35:24Z | - |
dc.date.issued | 2016 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=663397&flag=dissertation | en_US |
dc.identifier.uri | http://hdl.handle.net/10203/221578 | - |
dc.description | 학위논문(석사) - 한국과학기술원 : 신소재공학과, 2016.8 ,[vi, 55 p. :] | - |
dc.description.abstract | In this work, we reveal the effect of Al in InAlO (IAO) films, deposited by plasma-enhanced atomic layer deposition (PEALD). The material properties of IAO thin films and IAO TFTs are intensively studied by changing the ratio of Al/In. Since both Al and In are trivalent atoms, the variation in ratio of Al/In can cause huge change of structural and electrical properties of the IAO films. In addition, the optimized IAO TFTs with amorphous phase show excellent TFT performance. Here, two methods were used to fabricate the IAO films by PEALD. One is the common method to deposit the nano-laminated structure. The other is a very unique method that the homogeneous IAO film with either amorphous or polycrystalline phase was deposited for the first time. | - |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | aluminum (Al) | - |
dc.subject | plasma-enhanced atomic layer deposition (PEALD) | - |
dc.subject | nano-laminated structure | - |
dc.subject | homogeneous film | - |
dc.subject | amorphous oxide thin-film transistor (TFT) | - |
dc.subject | 알루미늄 | - |
dc.subject | 플라즈마 원자층 증착법 | - |
dc.subject | 나노 라미네이션 구조 | - |
dc.subject | 균일한 박막 | - |
dc.subject | 비정질 산화물 박막 트랜지스터 | - |
dc.title | (A) study on the effect of aluminum on an indium-aluminum oxide semiconductors deposited by PEALD to control the electrical and structural characteristics | - |
dc.title.alternative | 전기적 및 구조적 특성 조정을 위한, 원자층 증착법으로 증착된 인듐-알루미늄 산화물 반도체에 함유되는 알루미늄의 역할에 대한 연구 | - |
dc.type | Thesis(Master) | - |
dc.identifier.CNRN | 325007 | - |
dc.description.department | 한국과학기술원 :신소재공학과, | - |
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