백금을 코팅한 마이크로 다공성 실리콘 촉매지지체의 제작과 연소특성 평가Fabrication of the platinum coated porous silicon substrate and evaluation of combustion characteristics

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The characteristics of a micro catalytic combustor of mm scale was investigated. The nano-porous surface structure was fabricated on the p-type silicon substrate by electrochemical etching and was used as the catalyst support. Through parametric study of current density and etching time, the optimum fabrication process for porous silicon with diameter of 1 ~ 2㎛ and average pore of 25㎛ was determined. The coated substrate was tested in a micro channel combustor made of SUS 304. The exhaust gas was sampled and analyzed for the combustion efficiency. The temperature of the micro channel combustor over was 400℃ after 30 minutes of operation. The conversion rate of hydrogen was over 95%. Based on the results, the platinum coated porous silicon demonstrated a good candidate for catalyst support in a MEMS combustor.
Publisher
한국연소학회
Issue Date
2007-10
Keywords

Micro-combustor; Catalyst; Platinum coating; Porous silicon; Washcoat; Hydrogen gas; MEMS

Citation

한국연소학회지

URI
http://hdl.handle.net/10203/22042
Appears in Collection
AE-Journal Papers(저널논문)
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2007연소학회발표논문-김충기-양계병.pdf(928.14 kB)Download

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