In-situ Nanolithography with Sub-10 nm Resolution Realized by Warm Spin-Casting of a Self-Assembling Polymer

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Publisher
한국광학회
Issue Date
2016-07-13
Language
English
Citation

2016 한국광학회 하계학술발표회

URI
http://hdl.handle.net/10203/219527
Appears in Collection
MS-Conference Papers(학술회의논문)
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