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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

스퍼터링 방식으로 제작된 적외선 방사체 소자용 TiNx 박막의 공정압력에 따른 구조적, 전기적 특성 분석

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Lee, Hee Chulresearcher / Shin, Young Bong / Kang, In Ku
Publisher
마이크로나노시스템학회
Issue Date
2016-04-08
Language
Korean
Citation

한국MEMS학술대회

URI
http://hdl.handle.net/10203/219092
Appears in Collection
EE-Conference Papers(학술회의논문)
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