Gimbaled 2D scanning mirror with vertical combs for laser display

Abstract

We designed a gimbaled 2D scanning mirror (GSM) which is driven electrostatically by vertical comb fingers. The horizontal scanning mirror with a diameter of 1mm is rotating with respect to y-axis in the eye-shaped frame. For vertical scanning, the eye-shaped frame is rotating with respect to x-axis which is perpendicular to the horizontal scanning axis. This GSM can be actuated in two axes simultaneously resulting in the realization of 2D image in the screen with single beam raster scanning. We obtained a mechanical scanning angle of ±8°(resonance) and ±4.2°(non-resonance), with the resonant frequency range of 24 - 24.5kHz and 800 - 900Hz under the sinusoidal and triangular driving voltages for horizontal and vertical scanning, respectively. © 2006 IEEE.