DSpace at KOASAS: Development of a Loss Model between the Anchor and Substrate Foundation of a MEMS Resonator

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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Development of a Loss Model between the Anchor and Substrate Foundation of a MEMS Resonator

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Park, Yong Hwa researcher

Publisher: National Congress on Computational Mechanics

Issue Date: 2001-08

Citation: The 6th U.S. National Congress on Computational Mechanics

URI: http://hdl.handle.net/10203/216707

Appears in Collection: ME-Conference Papers(학술회의논문)

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Development of a Loss Model between the Anchor and Substrate Foundation of a MEMS Resonator

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