DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Jae Beom | ko |
dc.contributor.author | Jeong, Ki Hun | ko |
dc.date.accessioned | 2017-01-10T02:26:54Z | - |
dc.date.available | 2017-01-10T02:26:54Z | - |
dc.date.created | 2016-12-16 | - |
dc.date.created | 2016-12-16 | - |
dc.date.created | 2016-12-16 | - |
dc.date.issued | 2016-01-26 | - |
dc.identifier.citation | 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.651 - 654 | - |
dc.identifier.issn | 1084-6999 | - |
dc.identifier.uri | http://hdl.handle.net/10203/216444 | - |
dc.description.abstract | This paper reports a facile and low-cost technique for fabrication of micro-optical elements on the tip of an optical fiber using maskless UV exposure system. The Digital Micromirror Device (DMD) based maskless lithography system was employed to fabricate two-dimensional (2D) and three-dimensional (3D) microstructures. Based on this approach, various microstructures such as line arrays, concentric ring, and micro-photonic structures were successfully fabricated onto the fiber tips. This fabrication technique can be extended to develop miniaturized photonic devices for bioimaging or fiber-based sensing applications with rapid and inexpensive manner. | - |
dc.language | English | - |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
dc.title | INTERGRATION OF MICRO-OPTICAL ELEMENTS ON AN OPTICAL FIBER TIP USING DMD-BASED MASKLESS LITHOGRAPHY | - |
dc.type | Conference | - |
dc.identifier.wosid | 000381797300170 | - |
dc.identifier.scopusid | 2-s2.0-84971010938 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 651 | - |
dc.citation.endingpage | 654 | - |
dc.citation.publicationname | 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | - |
dc.identifier.conferencecountry | CC | - |
dc.identifier.conferencelocation | Shanghai | - |
dc.identifier.doi | 10.1109/MEMSYS.2016.7421710 | - |
dc.contributor.localauthor | Jeong, Ki Hun | - |
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