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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Strain Analysis of a Single-crystalline Silicon Membrane using FEM Simulation

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dc.contributor.authorKim, Choelgyu-
dc.contributor.authorBong, JH-
dc.contributor.authorHwang, WS-
dc.contributor.authorCho, Byung Jin-
dc.contributor.authorKim, Taek Soo-
dc.date.accessioned2017-01-10T01:46:45Z-
dc.date.available2017-01-10T01:46:45Z-
dc.date.created2016-12-16-
dc.date.issued2016-09-23-
dc.identifier.citationMPC 2016 Autumn Symposium-
dc.identifier.urihttp://hdl.handle.net/10203/216334-
dc.languageKorean-
dc.publisherMPC-
dc.titleStrain Analysis of a Single-crystalline Silicon Membrane using FEM Simulation-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameMPC 2016 Autumn Symposium-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocationSeoul, Korea-
dc.contributor.localauthorKim, Choelgyu-
dc.contributor.localauthorCho, Byung Jin-
dc.contributor.localauthorKim, Taek Soo-
dc.contributor.nonIdAuthorBong, JH-
dc.contributor.nonIdAuthorHwang, WS-
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EE-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
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