A Novel Process for Fabricating Vertical Silicon Nanotube Arrays Using Spacer Patterning Technique and Metal-assisted Chemical Etching
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeong, Hyeon Ho | ko |
| dc.contributor.author | 이정형 | ko |
| dc.contributor.author | 복철규 | ko |
| dc.contributor.author | Lee, Seok-Hee | ko |
| dc.contributor.author | Yoo, Seunghyup | ko |
| dc.date.accessioned | 2017-01-03T07:13:01Z | - |
| dc.date.available | 2017-01-03T07:13:01Z | - |
| dc.date.created | 2016-11-21 | - |
| dc.date.issued | 2016-07-14 | - |
| dc.identifier.citation | nano Korea 2016 symposium | - |
| dc.identifier.uri | http://hdl.handle.net/10203/215522 | - |
| dc.language | English | - |
| dc.publisher | 나노코리아 조직위원회(나노기술연구협의회, 나노융합산업연구조합) | - |
| dc.title | A Novel Process for Fabricating Vertical Silicon Nanotube Arrays Using Spacer Patterning Technique and Metal-assisted Chemical Etching | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | nano Korea 2016 symposium | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | KINTEX 제2전시장7,8홀 | - |
| dc.contributor.localauthor | Lee, Seok-Hee | - |
| dc.contributor.localauthor | Yoo, Seunghyup | - |
| dc.contributor.nonIdAuthor | 이정형 | - |
| dc.contributor.nonIdAuthor | 복철규 | - |
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