Machine learning (ML)-based lithography optimizations
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shin, Youngsoo | ko |
| dc.contributor.author | Shim, Seongbo | ko |
| dc.contributor.author | Choi, Suhyeong | ko |
| dc.date.accessioned | 2017-01-03T06:52:22Z | - |
| dc.date.available | 2017-01-03T06:52:22Z | - |
| dc.date.created | 2016-11-21 | - |
| dc.date.created | 2016-11-21 | - |
| dc.date.created | 2016-11-21 | - |
| dc.date.issued | 2016-10-25 | - |
| dc.identifier.citation | IEEE Asia Pacific Conference on Circuits and Systems | - |
| dc.identifier.uri | http://hdl.handle.net/10203/215429 | - |
| dc.language | English | - |
| dc.publisher | IEEE | - |
| dc.title | Machine learning (ML)-based lithography optimizations | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000392651200139 | - |
| dc.identifier.scopusid | 2-s2.0-85011026141 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | IEEE Asia Pacific Conference on Circuits and Systems | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 제주도 | - |
| dc.contributor.localauthor | Shin, Youngsoo | - |
| dc.contributor.nonIdAuthor | Choi, Suhyeong | - |
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