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College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Mega Bit DRAM Capacitor를 위한 무결함 박막 SiO2Defect Free Thin SiO2 Thermally Grown On Silicon For Mega Bit DRAM Capacitor

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dc.contributor.author이귀로-
dc.contributor.author여인석-
dc.contributor.author윤규한-
dc.contributor.author김병석-
dc.contributor.author최민성-
dc.contributor.author김병식-
dc.date.accessioned2011-01-10T01:23:07Z-
dc.date.available2011-01-10T01:23:07Z-
dc.date.created2012-02-06-
dc.date.issued1987-07-
dc.identifier.citation대한전자공학회 학술대회, v.9, no.5, pp.436 - 438-
dc.identifier.urihttp://hdl.handle.net/10203/21500-
dc.description본 논문은 국책사업인 4Mbit DRAM project의 일환으로 이루어진 것임.en
dc.languageKOR-
dc.language.isokoen
dc.publisher대한전자공학회-
dc.titleMega Bit DRAM Capacitor를 위한 무결함 박막 SiO2-
dc.title.alternativeDefect Free Thin SiO2 Thermally Grown On Silicon For Mega Bit DRAM Capacitor-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.volume9-
dc.citation.issue5-
dc.citation.beginningpage436-
dc.citation.endingpage438-
dc.citation.publicationname대한전자공학회 학술대회-
dc.identifier.conferencecountrySouth Korea-
dc.identifier.conferencecountrySouth Korea-
dc.contributor.localauthor이귀로-
dc.contributor.nonIdAuthor여인석-
dc.contributor.nonIdAuthor윤규한-
dc.contributor.nonIdAuthor김병석-
dc.contributor.nonIdAuthor최민성-
dc.contributor.nonIdAuthor김병식-
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EE-Conference Papers(학술회의논문)

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