DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Yong-Hwa | ko |
dc.contributor.author | Park, Kwangchun | ko |
dc.date.accessioned | 2016-09-07T02:54:30Z | - |
dc.date.available | 2016-09-07T02:54:30Z | - |
dc.date.created | 2016-08-24 | - |
dc.date.created | 2016-08-24 | - |
dc.date.issued | 2004-04 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.13, no.2, pp.238 - 247 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/212779 | - |
dc.description.abstract | A computational model is developed for the prediction of wave propagation in the substrate of a MEMS resonator to study energy loss mechanisms from the vibrating beams to the substrate, viz., anchor loss. The model employs a modified classical Fourier transform method under periodic excitations at the anchor area. The present substrate model, when applied to a typical commercially fabricated substrate, estimates that the anchor loss of an ends-anchored resonator with its center frequency of 50 MHz can reach as high as 0.05% in terms of equivalent damping ratio. Anchor loss versus resonator center frequency is assessed by varying the beam dimension, which predicts that anchor loss increases a hundredfold for every tenfold increase in resonator center frequency in the case of two ends-anchored beam resonators. The substrate model has been integrated into a coupled beam-substrate-electrostatics model and validated with experimental data. Development of the detailed coupled-physics model and its validation is presented in Part II as a companion paper | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | MICROSTRUCTURES | - |
dc.subject | LOAD | - |
dc.title | High-fidelity Modeling of MEMS resonators - Part 1: Anchor loss mechanisms through substrate | - |
dc.type | Article | - |
dc.identifier.wosid | 000220759300010 | - |
dc.identifier.scopusid | 2-s2.0-1942468583 | - |
dc.type.rims | ART | - |
dc.citation.volume | 13 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 238 | - |
dc.citation.endingpage | 247 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.identifier.doi | 10.1109/JMEMS.2004.825300 | - |
dc.contributor.localauthor | Park, Yong-Hwa | - |
dc.contributor.nonIdAuthor | Park, Kwangchun | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | damping | - |
dc.subject.keywordAuthor | energy loss | - |
dc.subject.keywordAuthor | MEMS resonator | - |
dc.subject.keywordAuthor | Q-factor | - |
dc.subject.keywordAuthor | structural vibration | - |
dc.subject.keywordAuthor | wave propagation | - |
dc.subject.keywordPlus | MICROSTRUCTURES | - |
dc.subject.keywordPlus | LOAD | - |
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