Design and optimization of RF ICs with embedded linear macromodels of multiport MEMS devices

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In this paper, we demonstrate efficient modeling approach for simulation, analysis, design, and optimization of multiport radio frequency microelectromechanical systems (RF MEMS) resonating structures embedded in RF circuits. An in-house finite element method (FEM) solver is utilized to develop accurate and efficient macromodels that capture all the essential characteristics of the device. Using the datasets generated from the FEM simulations, the artificial neural network models are trained for two-way mapping between the physical input and electrical output parameters. Realized model is implemented in a circuit simulator, enabling a simple yet accurate circuit simulator compatible modeling and optimization procedure instead of memory and time demanding FEM analysis. The derivation of dynamic macromodels with preserved electromechanical behavior of the multiport resonating structures is also presented. Capabilities of the proposed approach are demonstrated with several examples featuring capacitively actuated MEMS resonating structures: a clamped-clamped beam, a free-free beam, and a coupled clamped-clamped beam. (C) 2007 Wiley Periodicals, Inc
Publisher
WILEY-BLACKWELL
Issue Date
2007-03
Language
English
Article Type
Article
Keywords

ORDER DYNAMIC MACROMODELS; COMPUTER-AIDED GENERATION; MICROELECTROMECHANICAL SYSTEMS; RESONATORS; SUBSTRATE

Citation

INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING, v.17, no.2, pp.196 - 209

ISSN
1096-4290
DOI
10.1002/mmce.20214
URI
http://hdl.handle.net/10203/212767
Appears in Collection
ME-Journal Papers(저널논문)
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