Three-dimensional imaging using fast micromachined electro-absorptive shutter

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A 20-MHz switching high-speed light-modulating device for three-dimensional (3-D) image capturing and its system prototype are presented. For 3-D image capturing, the system utilizes a time-of-flight (TOF) principle by means of a 20-MHz high-speed micromachined electro-absorptive modulator, the so-called optical shutter. The high-speed modulation is obtained by utilizing the electro-absorption mechanism of the multilayer structure, which has an optical resonance cavity and light-absorption epilayers grown by metal organic chemical vapor deposition process. The optical shutter device is specially designed to have small resistor-capacitor-time constant to get the high-speed modulation. The optical shutter is positioned in front of a standard high-resolution complementary metal oxide semiconductor image sensor. The optical shutter modulates the incoming infrared image to acquire the depth image. The suggested novel optical shutter device enables capturing of a full high resolution-depth image, which has been limited to video graphics array (VGA) by previous depth-capturing technologies. The suggested 3-D image sensing device can have a crucial impact on 3-D-related business such as 3-D cameras, gesture recognition, user interfaces, and 3-D displays. This paper presents micro-opto-electro-mechanical systems-based optical shutter design, fabrication, characterization, 3-D camera system prototype, and image evaluation. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Issue Date
2013-04
Language
English
Article Type
Article
Keywords

CAMERA; SENSOR

Citation

JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, v.12, no.2

ISSN
1932-5150
DOI
10.1117/1.JMM.12.2.023011
URI
http://hdl.handle.net/10203/212693
Appears in Collection
ME-Journal Papers(저널논문)
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