A reference-free micro defect visualization using pulse laser scanning thermography and image processing

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dc.contributor.authorYang, Jinyeolko
dc.contributor.authorChoi, Jaemookko
dc.contributor.authorHwang, Soonkyuko
dc.contributor.authorAn, Yun-Kyuko
dc.contributor.authorSohn, Hoonko
dc.date.accessioned2016-09-07T01:42:06Z-
dc.date.available2016-09-07T01:42:06Z-
dc.date.created2016-08-16-
dc.date.created2016-08-16-
dc.date.created2016-08-16-
dc.date.issued2016-07-
dc.identifier.citationMEASUREMENT SCIENCE AND TECHNOLOGY, v.27, no.8-
dc.identifier.issn0957-0233-
dc.identifier.urihttp://hdl.handle.net/10203/212550-
dc.description.abstractAs quality control of micro devices and early detection of micro defects in these devices are becoming increasingly important, the demand for a fast and automated online inspection technique to detect micro defects with high spatial resolution is increasing. In this study, a reference-free micro defect visualization algorithm is developed based on laser scanning thermography to detect micro defects in devices instantaneously and automatically with high spatial resolution. A pulse modulated continuous wave laser generates thermal waves in a target device, and the corresponding thermal responses are recorded by an infrared (IR) camera. When the thermal wave encounters a micro defect, the propagation of the thermal wave is blocked at the interface of the micro defect. The blockage of the thermal wave is detected by the proposed reference-free micro defect visualization algorithm. First, an edge detection algorithm is applied to a raw thermal image obtained at a specific time point to extract the thermal discontinuities formed at the boundaries of the defect. The edge images obtained from all time sequences are then assembled into a single accumulated edge image to accentuate defect-induced thermal disturbances in the form of edge features. Finally, the accumulated edge image is automatically processed using a binary imaging algorithm to visualize the micro defect in the target device. The performance of the proposed reference-free micro defect visualization algorithm is examined using two types of specimens, semiconductor chips and ceramic-epoxy composites. The proposed algorithm successfully diagnoses micro defects ranging from 4 mu m to 40 mu m in width-
dc.languageEnglish-
dc.publisherIOP PUBLISHING LTD-
dc.titleA reference-free micro defect visualization using pulse laser scanning thermography and image processing-
dc.typeArticle-
dc.identifier.wosid000380124800034-
dc.identifier.scopusid2-s2.0-84978952309-
dc.type.rimsART-
dc.citation.volume27-
dc.citation.issue8-
dc.citation.publicationnameMEASUREMENT SCIENCE AND TECHNOLOGY-
dc.identifier.doi10.1088/0957-0233/27/8/085601-
dc.contributor.localauthorSohn, Hoon-
dc.contributor.nonIdAuthorYang, Jinyeol-
dc.contributor.nonIdAuthorChoi, Jaemook-
dc.contributor.nonIdAuthorHwang, Soonkyu-
dc.contributor.nonIdAuthorAn, Yun-Kyu-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorpulsed thermography-
dc.subject.keywordAuthorlaser scanning-
dc.subject.keywordAuthormicro defect visualization-
dc.subject.keywordAuthorimage processing-
dc.subject.keywordAuthorreference-free-
dc.subject.keywordAuthornon-destructive testing-
dc.subject.keywordPlusLOCK-IN THERMOGRAPHY-
dc.subject.keywordPlusMODULATED THERMOGRAPHY-
dc.subject.keywordPlusENHANCEMENT-
dc.subject.keywordPlusTOOL-
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